Cita APA

Guo, J., Yu, B., Wang, X., & Qian, L. (2014). Nanofabrication on monocrystalline silicon through friction-induced selective etching of Si(3)N(4) mask. Springer.

Chicago Style Citation

Guo, Jian, Bingjun Yu, Xiaodong Wang, i Linmao Qian. Nanofabrication On Monocrystalline Silicon Through Friction-induced Selective Etching of Si(3)N(4) Mask. Springer, 2014.

Cita MLA

Guo, Jian, Bingjun Yu, Xiaodong Wang, i Linmao Qian. Nanofabrication On Monocrystalline Silicon Through Friction-induced Selective Etching of Si(3)N(4) Mask. Springer, 2014.