Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr(0.52)Ti(0.48))O(3) (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was cont...

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Main Authors: Wang, Zhihong, Yao, Yingbang, Wang, Xianbin, Yue, Weisheng, Chen, Longqing, Zhang, Xi Xiang
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group 2013
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3816290/
https://ncbi.nlm.nih.gov/pubmed/24185198
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep03127
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