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Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs
High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuat...
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| Auteurs principaux: | , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Molecular Diversity Preservation International (MDPI)
2009
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3348830/ https://ncbi.nlm.nih.gov/pubmed/22574020 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90402389 |
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