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Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuat...

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Podrobná bibliografie
Hlavní autoři: Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed, Kraft, Michael, Lai, Yongjun, Masood ul Hassan, Muhammad
Médium: Artigo
Jazyk:Inglês
Vydáno: Molecular Diversity Preservation International (MDPI) 2009
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3348830/
https://ncbi.nlm.nih.gov/pubmed/22574020
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90402389
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