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Convergence Of Iterative Solvers For Non-Linear Step-And-Flash Imprint Lithography Simulations
The paper presents the analysis of the iterative solvers utilized to solve the non-linear problemof Step-and-Flash Imprint Lithography (SFIL) a modern patterning process. The simulationsconsists in solving molecular statics problem for the polymer network, with quadratic potentials.The model disting...
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Auteur principal: | |
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Format: | Artigo |
Langue: | Inglês |
Publié: |
AGH University of Science and Technology Press
2011-01-01
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Collection: | Computer Science |
Sujets: | |
Accès en ligne: | http://journals.agh.edu.pl/csci/article/download/101/47 |
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