A data mining approach for analyzing semiconductor MES and FDC data to enhance overall usage effectiveness (OUE)

Wafer fabrication is a complex and lengthy process that involves hundreds of process steps with monitoring numerous process parameters at the same time for yield enhancement. Big data is automatically collected during manufacturing processes in modern wafer fabrication facility. Thus, potential usef...

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מידע ביבליוגרפי
Main Authors: Chen-Fu Chien, Alejandra Campero Diaz, Yu-Bin Lan
פורמט: Artigo
שפה:Inglês
יצא לאור: Springer 2014-07-01
סדרה:International Journal of Computational Intelligence Systems
נושאים:
Overall Usage Effectiveness
Data Mining
Manufacturing Intelligence
Decision Tree
Cost Reduction
Semiconductor Manufacturing
גישה מקוונת:https://www.atlantis-press.com/article/25868570.pdf
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