A data mining approach for analyzing semiconductor MES and FDC data to enhance overall usage effectiveness (OUE)

Wafer fabrication is a complex and lengthy process that involves hundreds of process steps with monitoring numerous process parameters at the same time for yield enhancement. Big data is automatically collected during manufacturing processes in modern wafer fabrication facility. Thus, potential usef...

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Bibliografiske detaljer
Main Authors: Chen-Fu Chien, Alejandra Campero Diaz, Yu-Bin Lan
Format: Artigo
Sprog:Inglês
Udgivet: Springer 2014-07-01
Serier:International Journal of Computational Intelligence Systems
Fag:
Overall Usage Effectiveness
Data Mining
Manufacturing Intelligence
Decision Tree
Cost Reduction
Semiconductor Manufacturing
Online adgang:https://www.atlantis-press.com/article/25868570.pdf
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