Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing

A generalized method for the automated design of technological processes for the production of MEMS accelerometers is developed. This method is based on two methods: the method of selecting a standard technological processes and the method of searching for analogues of individual subsystems and elem...

Descrizione completa

Salvato in:
Dettagli Bibliografici
Autori principali: I. Sh. Nevliudov, K. L. Khrustalev, V. O. Bortnikova
Natura: Artigo
Lingua:Russo
Pubblicazione: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Serie:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Soggetti:
accelerometer
mems
technological process
method
computer-aided design
Accesso online:https://doklady.bsuir.by/jour/article/view/988
Tags: Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !

Documenti analoghi