Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing

A generalized method for the automated design of technological processes for the production of MEMS accelerometers is developed. This method is based on two methods: the method of selecting a standard technological processes and the method of searching for analogues of individual subsystems and elem...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Egile Nagusiak: I. Sh. Nevliudov, K. L. Khrustalev, V. O. Bortnikova
Formatua: Artigo
Hizkuntza:Russo
Argitaratua: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Saila:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Gaiak:
accelerometer
mems
technological process
method
computer-aided design
Sarrera elektronikoa:https://doklady.bsuir.by/jour/article/view/988
Etiketak: Etiketa erantsi
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!

Antzeko izenburuak