Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered...

पूर्ण विवरण

में बचाया:
ग्रंथसूची विवरण
मुख्य लेखकों: N. Ramakrishnan, R. Parthiban, Sawal Hamid Md Ali, Md Shabiul Islam, Ajay Achath Mohanan
स्वरूप: Artigo
भाषा:Inglês
प्रकाशित: MDPI AG 2013-02-01
श्रृंखला:Sensors
विषय:
surface acoustic wave devices
Sezawa wave mode
mass loading effect
sensors
FEM simulation
ऑनलाइन पहुंच:http://www.mdpi.com/1424-8220/13/2/2164
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