A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator

This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO<sub>2</sub> substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the...

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Bibliographic Details
Main Authors: Wenyao Liu, Wei Li, Chenxi Liu, Enbo Xing, Yanru Zhou, Lai Liu, Jun Tang
Format: Artigo
Language:Inglês
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
nanomechanical resonator
graphene
magnetic sensor
Online Access:https://www.mdpi.com/2072-666X/13/4/628
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