Ultra-Long-Term Reliable Encapsulation Using an Atomic Layer Deposited HfO₂/Al₂O₃/HfO₂ Triple-Interlayer for Biomedical Implants

od Changzheng Li, Maarten Cauwe, Yang Yang, David Schaubroeck, Lothar Mader, Maaike Op de Beeck
Izdano 2019-09-01