Ultra-Long-Term Reliable Encapsulation Using an Atomic Layer Deposited HfO₂/Al₂O₃/HfO₂ Triple-Interlayer for Biomedical Implants

per Changzheng Li, Maarten Cauwe, Yang Yang, David Schaubroeck, Lothar Mader, Maaike Op de Beeck
Publicat 2019-09-01